CN106756898B - Preparation method of antibacterial hydrophobic ZnO nanorods - Google Patents
Preparation method of antibacterial hydrophobic ZnO nanorods Download PDFInfo
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- CN106756898B CN106756898B CN201611046447.8A CN201611046447A CN106756898B CN 106756898 B CN106756898 B CN 106756898B CN 201611046447 A CN201611046447 A CN 201611046447A CN 106756898 B CN106756898 B CN 106756898B
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- 239000002073 nanorod Substances 0.000 title claims abstract description 35
- 230000000844 anti-bacterial effect Effects 0.000 title claims abstract description 33
- 230000002209 hydrophobic effect Effects 0.000 title claims abstract description 16
- 238000002360 preparation method Methods 0.000 title claims description 12
- 239000010936 titanium Substances 0.000 claims abstract description 56
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 28
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005498 polishing Methods 0.000 claims abstract description 21
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims abstract description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000008367 deionised water Substances 0.000 claims abstract description 18
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 18
- 238000001027 hydrothermal synthesis Methods 0.000 claims abstract description 17
- XIOUDVJTOYVRTB-UHFFFAOYSA-N 1-(1-adamantyl)-3-aminothiourea Chemical compound C1C(C2)CC3CC2CC1(NC(=S)NN)C3 XIOUDVJTOYVRTB-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000004312 hexamethylene tetramine Substances 0.000 claims abstract description 12
- 235000010299 hexamethylene tetramine Nutrition 0.000 claims abstract description 12
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 239000007864 aqueous solution Substances 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 21
- 239000000243 solution Substances 0.000 claims description 21
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 20
- 238000003980 solgel method Methods 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 19
- 238000000231 atomic layer deposition Methods 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 17
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 claims description 14
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 239000002243 precursor Substances 0.000 claims description 10
- 239000011701 zinc Substances 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 230000035484 reaction time Effects 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000004528 spin coating Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000000084 colloidal system Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 2
- WEUCTTBUEWINIJ-UHFFFAOYSA-N acetic acid;zinc;dihydrate Chemical compound O.O.[Zn].CC(O)=O WEUCTTBUEWINIJ-UHFFFAOYSA-N 0.000 claims 2
- 229940031098 ethanolamine Drugs 0.000 claims 2
- 210000001367 artery Anatomy 0.000 claims 1
- 229960000935 dehydrated alcohol Drugs 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 229960004756 ethanol Drugs 0.000 claims 1
- 239000006193 liquid solution Substances 0.000 claims 1
- 210000003462 vein Anatomy 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000005923 long-lasting effect Effects 0.000 abstract description 2
- 238000004506 ultrasonic cleaning Methods 0.000 abstract description 2
- 238000001035 drying Methods 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 123
- 239000011787 zinc oxide Substances 0.000 description 63
- 235000014692 zinc oxide Nutrition 0.000 description 61
- 238000010586 diagram Methods 0.000 description 15
- 238000001878 scanning electron micrograph Methods 0.000 description 8
- 229910001651 emery Inorganic materials 0.000 description 7
- 239000007943 implant Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 239000003242 anti bacterial agent Substances 0.000 description 4
- YZYKBQUWMPUVEN-UHFFFAOYSA-N zafuleptine Chemical compound OC(=O)CCCCCC(C(C)C)NCC1=CC=C(F)C=C1 YZYKBQUWMPUVEN-UHFFFAOYSA-N 0.000 description 4
- 229940088710 antibiotic agent Drugs 0.000 description 3
- 239000012620 biological material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 241000191967 Staphylococcus aureus Species 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000032770 biofilm formation Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 208000037408 Device failure Diseases 0.000 description 1
- 208000037581 Persistent Infection Diseases 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000000181 anti-adherent effect Effects 0.000 description 1
- 230000010065 bacterial adhesion Effects 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 230000000975 bioactive effect Effects 0.000 description 1
- 230000003115 biocidal effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004053 dental implant Substances 0.000 description 1
- 230000000855 fungicidal effect Effects 0.000 description 1
- 239000000417 fungicide Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 238000010335 hydrothermal treatment Methods 0.000 description 1
- 208000015181 infectious disease Diseases 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 238000000968 medical method and process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001937 non-anti-biotic effect Effects 0.000 description 1
- 230000000399 orthopedic effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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Abstract
一种抗菌疏水性ZnO纳米棒的制备方法,包括如下步骤:步骤一,钛片机械抛光处理,依次将钛片打磨,至表面光滑,将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;步骤二,制备ZnO种子层,将步骤一得到的抛光钛片作为基底,镀一层均匀的ZnO种子层;步骤三,制备ZnO纳米棒,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在六水硝酸锌和六次甲基四胺的水溶液中,进行水热反应后自然冷却,取出基底后用去离子水清洗后干燥后即为ZnO纳米棒。其优点是:具有较好的抗菌效果,无需高温加热、亦无有害气体产生,经济环保;广谱、高效和持久性的抗菌性,且具有一定的生物相容性。
A method for preparing antibacterial hydrophobic ZnO nanorods, comprising the following steps: step 1, mechanically polishing titanium sheets, polishing the titanium sheets in turn until the surface is smooth, placing the polished titanium sheets in acetone, absolute ethanol and deionized Ultrasonic cleaning in water for 15 minutes, natural drying at room temperature, and subsequent use; Step 2, preparing a ZnO seed layer, using the polished titanium sheet obtained in Step 1 as a substrate, and coating a uniform ZnO seed layer; Step 3, preparing ZnO nanorods, Suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the aqueous solution of zinc nitrate hexahydrate and hexamethylenetetramine, perform a hydrothermal reaction and cool naturally, take out the substrate, wash it with deionized water, and dry it. for ZnO nanorods. Its advantages are: good antibacterial effect, no need for high temperature heating, no harmful gas generation, economical and environmental protection; broad-spectrum, high-efficiency and long-lasting antibacterial properties, and certain biocompatibility.
Description
技术领域technical field
本发明涉及钛基生物材料技术领域,具体地说是一种抗菌疏水性ZnO纳米棒的制备方法。The invention relates to the technical field of titanium-based biomaterials, in particular to a method for preparing antibacterial hydrophobic ZnO nanorods.
背景技术Background technique
钛基生物材料拥有良好的生物相容性、力学性能和优异的抗腐蚀性能,并且已经被广泛应用于矫形和牙科植入体材料。然而,植入体相关的感染经常发生在手术过程中或手术后,导致植入体手术失败,这主要由细菌的黏附和生物膜的形成造成。一旦生物膜在植入体表面形成,慢性感染会随之发生,而且基于抗生素的传统的医疗方法一般没有很好的效果,因为细菌对抗生素和化学消毒试剂具有一定的耐药性,这将最终导致植入体的移除。移除植入体会增加患者的住院时间和医疗费用,在这个过程中给病人带来巨大的痛苦,甚至会威胁到病人的生命安全。Titanium-based biomaterials have good biocompatibility, mechanical properties and excellent corrosion resistance, and have been widely used in orthopedic and dental implant materials. However, implant-associated infections often occur during or after surgery, leading to surgical implant failure, which is mainly caused by bacterial adhesion and biofilm formation. Once biofilms are formed on the implant surface, chronic infection will ensue, and traditional medical methods based on antibiotics are generally not very effective, because bacteria have certain resistance to antibiotics and chemical disinfection agents, which will eventually leading to removal of the implant. Removing the implant will increase the patient's hospital stay and medical expenses, bring great pain to the patient in the process, and even threaten the patient's life safety.
因此,钛基生物材料应该被赋予自抗菌功能,大量文献也报道过各种对医用生物植入材料表面的抗菌改性。表面改性技术特别是涂层技术能赋予钛植入体表面以良好的抗菌性能,例如抗生素负载的涂层、生物活性的抗菌的聚合物涂层、无机杀菌剂掺杂的涂层、抗粘附的涂层和非抗生素的有机杀菌剂负载的涂层等等。因此,如何制备一种抗菌、疏水的纳米棒是目前亟待解决的问题。Therefore, titanium-based biomaterials should be endowed with self-antibacterial functions, and a large number of literatures have also reported various antibacterial modifications on the surface of medical bioimplant materials. Surface modification technology, especially coating technology, can endow the surface of titanium implants with good antibacterial properties, such as antibiotic-loaded coatings, bioactive antibacterial polymer coatings, inorganic bactericide-doped coatings, anti-adhesive coatings, etc. Attached coatings and non-antibiotic organic fungicide-loaded coatings, etc. Therefore, how to prepare an antibacterial and hydrophobic nanorod is an urgent problem to be solved.
发明内容Contents of the invention
本发明的目的是为了解决上述技术缺陷,提供的一种抗菌效果持久、高效、广谱的抗菌疏水性ZnO纳米棒的制备方法,具体包括如下步骤:The purpose of the present invention is in order to solve above-mentioned technical defect, the preparation method of a kind of antibacterial effect lasting, efficient, broad-spectrum antibacterial hydrophobic ZnO nanorod provided, specifically comprises the following steps:
步骤一,钛片机械抛光处理Step 1, mechanical polishing of titanium sheet
在抛光机上用240、600、1200和2400目金刚砂依次将钛片打磨,至表面光滑,将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;Use 240, 600, 1200 and 2400 mesh emery on a polishing machine to polish the titanium sheet in turn until the surface is smooth. Place the polished titanium sheet in acetone, absolute ethanol and deionized water for 15 minutes, and then dry it naturally at room temperature. spare;
步骤二,制备ZnO种子层Step 2, preparing ZnO seed layer
将步骤一得到的抛光钛片作为基底,采用溶胶-凝胶法或原子层沉积法或高真空磁控溅射法镀一层均匀的ZnO种子层;The polished titanium sheet obtained in step 1 is used as a substrate, and a uniform ZnO seed layer is coated by a sol-gel method or an atomic layer deposition method or a high-vacuum magnetron sputtering method;
步骤三,制备ZnO纳米棒Step 3, preparing ZnO nanorods
将步骤二得到的涂有ZnO种子层的基底倒置悬浮在含0.015-0.025mol/L六水硝酸锌、0.015-0.025mol/L六次甲基四胺的水溶液中,水热反应温度为70-90℃,水热反应时间为3-6小时,反应后自然冷却,取出基底后用去离子水清洗后干燥后即为ZnO纳米棒。The substrate coated with the ZnO seed layer obtained in step 2 is inverted and suspended in an aqueous solution containing 0.015-0.025mol/L zinc nitrate hexahydrate and 0.015-0.025mol/L hexamethylenetetramine, and the hydrothermal reaction temperature is 70- 90°C, the hydrothermal reaction time is 3-6 hours, naturally cool after the reaction, take out the substrate, wash it with deionized water, and dry it to form ZnO nanorods.
优选地,步骤三中六水硝酸锌的浓度为0.025mol/L、六次甲基四胺的浓度为0.025mol/L。Preferably, the concentration of zinc nitrate hexahydrate in step 3 is 0.025 mol/L, and the concentration of hexamethylenetetramine is 0.025 mol/L.
步骤二所述的溶胶-凝胶法,具体步骤为:The sol-gel method described in step 2, concrete steps are:
1)配制0.35-0.85mol/L二水合乙酸锌和0.35-0.85mol/L乙醇胺的乙醇溶液,之后持续搅拌2-4小时得到无色透明胶体并在室温下保存20-24小时,待溶胶充分陈化,即获得前驱体溶液;1) Prepare an ethanol solution of 0.35-0.85mol/L zinc acetate dihydrate and 0.35-0.85mol/L ethanolamine, then keep stirring for 2-4 hours to obtain a colorless transparent colloid and store it at room temperature for 20-24 hours until the sol is fully Aging, that is, obtaining the precursor solution;
2)使用旋转涂覆仪涂覆20-30μL前驱体溶液到钛片上,前期500-1000转持续10-15秒,后期3000-5000转持续20-30秒,之后用氮气吹干,旋涂过程重复2次;2) Use a spin coater to coat 20-30 μL of the precursor solution onto the titanium sheet. The first stage is 500-1000 rotations for 10-15 seconds, and the later stage is 3000-5000 rotations for 20-30 seconds. After that, blow dry with nitrogen and spin coating process Repeat 2 times;
3)之后将涂覆有种子层的钛片在400-500℃烧制40-60分钟,缓慢降至室温。3) After that, the titanium sheet coated with the seed layer is fired at 400-500° C. for 40-60 minutes, and slowly lowered to room temperature.
优选地,步骤1)中二水合乙酸锌的浓度为0.75mol/L、乙醇胺的浓度为0.75mol/L;Preferably, the concentration of zinc acetate dihydrate in step 1) is 0.75mol/L, and the concentration of ethanolamine is 0.75mol/L;
步骤2)中旋涂参数为前期1000转持续15s,后期5000转持续30s;In step 2), the spin coating parameters are 1000 rpm for 15s in the early stage and 5000 rpm for 30s in the later stage;
步骤3)中烧制参数为500℃下60分钟。The firing parameter in step 3) is 60 minutes at 500°C.
对于原子层沉积法,具体方法为:For the atomic layer deposition method, the specific method is:
1)以二乙基锌(DEZ)和水做为锌源和氧源制备氧化锌溶液作为前驱体,然后对基底进行沉积,具体为在沉积温度为80-100℃,沉积压强为20-40Pa,沉积流量为10-20的条件下,以通水脉冲0.1s、高纯氮清洗20s、二乙基锌脉冲0.1s、高纯氮清洗20s作为一个循环进行沉积(H2O/N2/DEZ/N2=0.1:20:0.1:20s),循环次数为200-300,在基底上获得ZnO种子层。1) Use diethyl zinc (DEZ) and water as the zinc source and oxygen source to prepare a zinc oxide solution as a precursor, and then deposit the substrate, specifically at a deposition temperature of 80-100°C and a deposition pressure of 20-40Pa , under the condition that the deposition flow rate is 10-20, the deposition is carried out as a cycle with water pulse 0.1s, high-purity nitrogen cleaning 20s, diethyl zinc pulse 0.1s, high-purity nitrogen cleaning 20s (H 2 O/N 2 / DEZ/N 2 =0.1:20:0.1:20s), the number of cycles is 200-300, and a ZnO seed layer is obtained on the substrate.
优选地,步骤1)中反应沉积温度为100℃、沉积压强为40Pa、沉积流量为20、反应循环次数为300。Preferably, in step 1), the reaction deposition temperature is 100° C., the deposition pressure is 40 Pa, the deposition flow rate is 20, and the number of reaction cycles is 300.
对于高真空磁控溅射法,具体方法为:For the high vacuum magnetron sputtering method, the specific method is:
1)利用射频磁控溅射,先让压力降到6.0×10-4Pa以下,然后通高纯氩作为工作气体到压力为2.0-3.0Pa,溅射温度为15-25℃,溅射功率为100-120W,溅射时间80-120秒。1) Using radio frequency magnetron sputtering, let the pressure drop below 6.0×10 -4 Pa first, and then pass high-purity argon as the working gas to a pressure of 2.0-3.0Pa, the sputtering temperature is 15-25°C, and the sputtering power It is 100-120W, and the sputtering time is 80-120 seconds.
优选地,步骤1)中溅射温度为25℃、溅射功率为120W、溅射时间120s;步骤3的六水硝酸锌的浓度为0.025mol/L、六次甲基四胺的浓度为0.025mol/L。Preferably, the sputtering temperature in step 1) is 25°C, the sputtering power is 120W, and the sputtering time is 120s; the concentration of zinc nitrate hexahydrate in step 3 is 0.025mol/L, and the concentration of hexamethylenetetramine is 0.025 mol/L.
抗菌疏水性ZnO纳米棒的制备方法,其优点是:The preparation method of antibacterial hydrophobic ZnO nanorod has the advantages of:
(1)采用溶胶-凝胶法、原子层沉积法、高真空磁控溅射三种方法在基底上均匀镀ZnO种子层,同时可通过调控相关参数控制ZnO种子层的厚度,具有较好的抗菌效果,无需高温加热、亦无有害气体产生,经济环保;(1) Three methods of sol-gel method, atomic layer deposition method and high vacuum magnetron sputtering are used to uniformly plate ZnO seed layer on the substrate, and the thickness of ZnO seed layer can be controlled by adjusting related parameters, which has better Antibacterial effect, no need for high temperature heating, no harmful gas generation, economical and environmentally friendly;
(2)相比较于抗生素等有机抗菌剂,ZnO纳米棒阵列有广谱、高效和持久性的抗菌性,且具有一定的生物相容性,同时,疏水表面具有防垢和防污染性能,可用以制备钛基金属生物医用植入体材料和医疗器械用具,防止植入支架管材料表面的结垢和细菌生物膜形成;(2) Compared with organic antibacterial agents such as antibiotics, ZnO nanorod arrays have broad-spectrum, high-efficiency and long-lasting antibacterial properties, and have certain biocompatibility. At the same time, the hydrophobic surface has anti-scaling and anti-pollution properties, which can be used To prepare titanium-based metal biomedical implant materials and medical devices, to prevent scaling and bacterial biofilm formation on the surface of implanted stent tube materials;
(3)制备方法简单易行,无有毒有害气体产生,经济环保,采用本发明技术制备表面具有优异抗菌性的ZnO纳米棒阵列的三种制备方法,实施难度小,设备投入少,消耗资源少;(3) The preparation method is simple and easy, no toxic and harmful gas is produced, economical and environmentally friendly, and the three preparation methods of ZnO nanorod arrays with excellent antibacterial properties on the surface are prepared by the technology of the present invention, and the implementation difficulty is small, the equipment investment is small, and the consumption of resources is small. ;
附图说明Description of drawings
图1为ZnO种子层和纳米棒对金黄色葡萄球菌的抗菌OD柱状对比图。Figure 1 is a columnar comparison chart of the antibacterial OD of ZnO seed layer and nanorods against Staphylococcus aureus.
其中,ALD:原子层沉积;sol:溶胶凝胶;spu:高真空磁控溅射;ZnOs:氧化锌种子层;ZnO:氧化锌纳米棒阵列;Among them, ALD: atomic layer deposition; sol: sol-gel; spu: high vacuum magnetron sputtering; ZnOs: zinc oxide seed layer; ZnO: zinc oxide nanorod array;
图2为实施例1中钛片机械抛光处理后的SEM图。FIG. 2 is an SEM image of the titanium sheet in Example 1 after mechanical polishing.
图3为实施例1中溶胶-凝胶法得到的ZnO种子层SEM图。FIG. 3 is an SEM image of the ZnO seed layer obtained by the sol-gel method in Example 1. FIG.
图4为实施例2中原子层沉积法得到的ZnO种子层SEM图。FIG. 4 is an SEM image of the ZnO seed layer obtained by the atomic layer deposition method in Example 2. FIG.
图5为实施例3中高真空磁控溅射得到的ZnO种子层SEM图。5 is an SEM image of the ZnO seed layer obtained by high vacuum magnetron sputtering in Example 3.
图6为实施例1中溶胶-凝胶法后水热的SEM图。Fig. 6 is the SEM picture of hydrothermal after sol-gel method in embodiment 1.
图7为实施例2中原子层沉积法后水热的SEM图。FIG. 7 is a SEM image of hydrothermal after atomic layer deposition in Example 2. FIG.
图8为实施例3中高真空磁控溅射后水热的SEM图。FIG. 8 is a SEM image of hydrothermal after high vacuum magnetron sputtering in Example 3.
图9为实施例1中抛光钛片的接触角图。FIG. 9 is a contact angle diagram of the polished titanium sheet in Example 1. FIG.
图10为实施例1中溶胶-凝胶法得到的ZnO种子层的接触角图。FIG. 10 is a diagram of the contact angle of the ZnO seed layer obtained by the sol-gel method in Example 1. FIG.
图11为实施例2中原子层沉积法得到的ZnO种子层的接触角图。FIG. 11 is a diagram of the contact angle of the ZnO seed layer obtained by the atomic layer deposition method in Example 2. FIG.
图12为实施例3中高真空磁控溅射得到的ZnO种子层的接触角图。12 is a contact angle diagram of the ZnO seed layer obtained by high vacuum magnetron sputtering in Example 3.
图13为实施例1中溶胶-凝胶法后水热的接触角图。FIG. 13 is a diagram of the hydrothermal contact angle after the sol-gel method in Example 1. FIG.
图14为实施例2中原子层沉积法后水热的接触角图。FIG. 14 is a diagram of the hydrothermal contact angle after atomic layer deposition in Example 2. FIG.
图15为实施例3高真空磁控溅射后水热的接触角图。Fig. 15 is a diagram of the hydrothermal contact angle after high vacuum magnetron sputtering in Example 3.
图16为实施例7中溶胶-凝胶法得到的ZnO种子层SEM图。FIG. 16 is an SEM image of the ZnO seed layer obtained by the sol-gel method in Example 7. FIG.
图17为实施例8中溶胶-凝胶法得到的ZnO种子层SEM图。17 is an SEM image of the ZnO seed layer obtained by the sol-gel method in Example 8.
具体实施方式:Detailed ways:
为更好理解本发明,下面结合附图和实施例对本发明做进一步地详细说明,但是本发明要求保护的范围并不局限于实施例表示的范围。In order to better understand the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and examples, but the protection scope of the present invention is not limited to the range indicated by the examples.
实施例1:Example 1:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨,至表面光滑后,将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet in turn until the surface is smooth, then place the polished titanium sheet in acetone, no Ultrasonic cleaning in water, ethanol and deionized water for 15 minutes, then dry naturally at room temperature, and set aside;
(2)将得到的抛光钛片作为基底,采用溶胶-凝胶法镀一层均匀的ZnO种子层;具体方法为,配制0.75mol/L二水合乙酸锌和0.75mol/L乙醇胺的乙醇溶液,之后持续搅拌4h得到无色透明胶体并在室温下保存24h,待溶胶充分陈化,即获得前驱体溶液,使用旋转涂覆仪涂覆30μL前驱体溶液到钛片上,其参数为前期1000转持续15秒,后期5000转持续30秒,之后用氮气吹干,旋涂过程重复2次,之后将涂覆有种子层的钛片在500℃烧制60分钟,缓慢降至室温;(2) The polished titanium sheet obtained is used as a substrate, and a uniform ZnO seed layer is plated by a sol-gel method; the specific method is to prepare an ethanol solution of 0.75mol/L zinc acetate dihydrate and 0.75mol/L ethanolamine, Then keep stirring for 4 hours to obtain a colorless transparent colloid and store it at room temperature for 24 hours. After the sol is fully aged, the precursor solution is obtained. Use a spin coater to coat 30 μL of the precursor solution on the titanium sheet. 15 seconds, 5000 rpm for 30 seconds in the later stage, then blow dry with nitrogen, repeat the spin coating process twice, then fire the titanium sheet coated with the seed layer at 500°C for 60 minutes, and slowly cool down to room temperature;
(3)首先配制0.025mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.025mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为90℃,水热反应时间为6h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) First prepare 60ml of aqueous solution of 0.025mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.025mol/L hexamethylenetetramine (C 6 H 12 N 4 ), and Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 90°C, and the hydrothermal reaction time is 6h. After the reaction, after natural cooling Remove the substrate, rinse it with deionized water immediately and dry it for later use.
实施例2:Example 2:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨至表面光滑后将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet until the surface is smooth, then place the polished titanium sheet in acetone and absolute ethanol in turn and deionized water for 15 minutes, then dry naturally at room temperature and set aside;
(2)将得到的抛光钛片作为基底,采用原子层沉积法镀一层均匀的ZnO种子层,具体为:以二乙基锌(DEZ)和水做为锌源和氧源制备氧化锌溶液作为前驱体,然后对基底进行沉积,在沉积温度为100℃,沉积压强为40Pa,沉积流量为20的条件下,以通水脉冲0.1s、高纯氮清洗20s、二乙基锌脉冲0.1s、高纯氮清洗20s作为一个循环进行沉积(H2O/N2/DEZ/N2=0.1:20:0.1:20s),循环次数为300,在基底上获得ZnO种子层。(2) The obtained polished titanium sheet is used as a substrate, and a uniform ZnO seed layer is plated by atomic layer deposition, specifically: a zinc oxide solution is prepared with diethyl zinc (DEZ) and water as a zinc source and an oxygen source As a precursor, the substrate is then deposited. Under the conditions of a deposition temperature of 100°C, a deposition pressure of 40 Pa, and a deposition flow rate of 20, pulse water for 0.1s, high-purity nitrogen for 20s, and diethylzinc for 0.1s 1. Cleaning with high-purity nitrogen for 20 s was performed as a cycle for deposition (H 2 O/N 2 /DEZ/N 2 =0.1:20:0.1:20 s), the number of cycles was 300, and a ZnO seed layer was obtained on the substrate.
(3)首先配制0.025mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.025mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为90℃,水热反应时间为6h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) First prepare 60ml of aqueous solution of 0.025mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.025mol/L hexamethylenetetramine (C 6 H 12 N 4 ), and Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 90°C, and the hydrothermal reaction time is 6h. After the reaction, after natural cooling Remove the substrate, rinse it with deionized water immediately and dry it for later use.
实施例3:Example 3:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨至表面光滑后将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet until the surface is smooth, then place the polished titanium sheet in acetone and absolute ethanol in turn and deionized water for 15 minutes, then dry naturally at room temperature and set aside;
(2)将得到的抛光钛片作为基底,采用高真空磁控溅射法镀一层均匀的ZnO种子层;具体为,利用射频磁控溅射,先让压力降到6.0×10-4Pa以下,然后通高纯氩为工作气体到压力为3.0Pa,溅射温度为25℃,溅射功率为120W,溅射时间120s;(2) Use the obtained polished titanium sheet as a substrate, and apply a uniform ZnO seed layer by high-vacuum magnetron sputtering; specifically, use radio frequency magnetron sputtering to first let the pressure drop below 6.0×10-4Pa , and then pass high-purity argon as the working gas to a pressure of 3.0Pa, a sputtering temperature of 25°C, a sputtering power of 120W, and a sputtering time of 120s;
(3)首先配制0.025mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.025mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为90℃,水热反应时间为6h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) First prepare 60ml of aqueous solution of 0.025mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.025mol/L hexamethylenetetramine (C6H 12 N 4 ), and mix it Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 90°C, and the hydrothermal reaction time is 6h. After the reaction, take out the substrate after natural cooling , immediately rinsed with deionized water and dried for later use.
实施例4:Example 4:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨至表面光滑后将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet until the surface is smooth, then place the polished titanium sheet in acetone and absolute ethanol in turn and deionized water for 15 minutes, then dry naturally at room temperature and set aside;
(2)将得到的抛光钛片作为基底,采用溶胶-凝胶法镀一层均匀的ZnO种子层;具体方法为,配制0.35mol/L二水合乙酸锌和0.35mol/L乙醇胺的乙醇溶液,之后持续搅拌4h得到无色透明胶体并在室温下保存24h,待溶胶充分陈化,即获得前驱体溶液,使用旋转涂覆仪涂覆20μL前驱体溶液到钛片上,其参数为前期500转持续15秒,后期3000转持续30秒,之后用氮气吹干,旋涂过程重复2次,之后将涂覆有种子层的钛片在400℃烧制60分钟,缓慢降至室温;(2) The obtained polished titanium sheet is used as a substrate, and a uniform ZnO seed layer is plated by a sol-gel method; the specific method is to prepare an ethanol solution of 0.35mol/L zinc acetate dihydrate and 0.35mol/L ethanolamine, Then keep stirring for 4 hours to obtain a colorless transparent colloid and store it at room temperature for 24 hours. After the sol is fully aged, the precursor solution is obtained. Use a spin coater to coat 20 μL of the precursor solution on the titanium sheet. 15 seconds, 3000 rpm in the later stage for 30 seconds, then blow dry with nitrogen, repeat the spin coating process twice, then fire the titanium sheet coated with the seed layer at 400°C for 60 minutes, and slowly cool down to room temperature;
(3)首先配制0.025mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.025mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为90℃,水热反应时间为6h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) First prepare 60ml of aqueous solution of 0.025mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.025mol/L hexamethylenetetramine (C6H 12 N 4 ), and mix it Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 90°C, and the hydrothermal reaction time is 6h. After the reaction, take out the substrate after natural cooling , immediately rinsed with deionized water and dried for later use.
实施例5:Example 5:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨至表面光滑后将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet until the surface is smooth, then place the polished titanium sheet in acetone and absolute ethanol in turn and deionized water for 15 minutes, then dry naturally at room temperature and set aside;
(2)将得到的抛光钛片作为基底,采用原子层沉积法镀一层均匀的ZnO种子层,具体为:以二乙基锌(DEZ)和水做为锌源和氧源制备氧化锌溶液作为前驱体,然后对基底进行沉积,在沉积温度为100℃,沉积压强为40Pa,沉积流量为20的条件下,以通水脉冲0.1s、高纯氮清洗20s、二乙基锌脉冲0.1s、高纯氮清洗20s作为一个循环进行沉积(H2O/N2/DEZ/N2=0.1:20:0.1:20s),循环次数为300,在基底上获得ZnO种子层。(2) The obtained polished titanium sheet is used as a substrate, and a uniform ZnO seed layer is plated by atomic layer deposition, specifically: a zinc oxide solution is prepared with diethyl zinc (DEZ) and water as a zinc source and an oxygen source As a precursor, the substrate is then deposited. Under the conditions of a deposition temperature of 100°C, a deposition pressure of 40 Pa, and a deposition flow rate of 20, pulse water for 0.1s, high-purity nitrogen for 20s, and diethylzinc for 0.1s 1. Cleaning with high-purity nitrogen for 20 s is used as a cycle for deposition (H 2 O/N 2 /DEZ/N 2 =0.1:20:0.1:20 s), the number of cycles is 300, and a ZnO seed layer is obtained on the substrate.
(3)首先配制0.035mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.035mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为90℃,水热反应时间为6h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) First prepare 60ml of aqueous solution of 0.035mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.035mol/L hexamethylenetetramine (C6H 12 N 4 ), and mix it Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 90°C, and the hydrothermal reaction time is 6h. After the reaction, take out the substrate after natural cooling , immediately rinsed with deionized water and dried for later use.
实施例6:Embodiment 6:
(1)钛片(直径6mm,厚度2mm)机械抛光处理:在抛光机上用240,600,1200和2400目金刚砂依次将钛片打磨至表面光滑后将抛光钛片依次置于丙酮、无水乙醇和去离子水中各超声清洗15分钟,室温下自然干燥,备用;(1) Titanium sheet (diameter 6mm, thickness 2mm) mechanical polishing: use 240, 600, 1200 and 2400 mesh emery on the polishing machine to polish the titanium sheet until the surface is smooth, then place the polished titanium sheet in acetone and absolute ethanol in turn and deionized water for 15 minutes, then dry naturally at room temperature and set aside;
(2)将得到的抛光钛片作为基底,采用高真空磁控溅射法镀一层均匀的ZnO种子层;具体为,利用射频磁控溅射,先让压力降到为6.0×10-4Pa以下,然后通高纯氩为工作气体到压力为2.0Pa,溅射温度为15℃,溅射功率为100W,溅射时间80s;(2) Use the obtained polished titanium sheet as a substrate, and apply a uniform ZnO seed layer by high-vacuum magnetron sputtering; specifically, use radio frequency magnetron sputtering to first reduce the pressure to 6.0×10-4Pa Below, then pass high-purity argon as the working gas to a pressure of 2.0Pa, a sputtering temperature of 15°C, a sputtering power of 100W, and a sputtering time of 80s;
(3)首先配制0.015mol/L六水硝酸锌(Zn(NO3)2)·6H2O)和0.015mol/L六次甲基四胺(C6H12N4)的水溶液60ml,并将其倒于容量100ml水热釜中,将步骤二得到的涂有ZnO种子层的基底倒置悬浮在溶液中,水热反应温度为70℃,水热反应时间为3h,反应后,自然冷却后取出基底,立即用去离子水清洗后干燥备用。(3) 60ml of an aqueous solution of 0.015mol/L zinc nitrate hexahydrate (Zn(NO 3 ) 2) 6H 2 O) and 0.015mol/L hexamethylenetetramine (C 6 H 12 N 4 ) was first prepared, and Pour it into a hydrothermal kettle with a capacity of 100ml, and suspend the substrate coated with the ZnO seed layer obtained in step 2 upside down in the solution. The hydrothermal reaction temperature is 70°C, and the hydrothermal reaction time is 3h. After the reaction, after natural cooling Remove the substrate, rinse it with deionized water immediately and dry it for later use.
实施例7:Embodiment 7:
(1)将干净玻璃片(1×1cm2)依次置于丙酮、无水乙醇和去离子水中各超声清洗15min,室温下自然干燥,备用;(1) Place clean glass slides (1×1cm 2 ) in acetone, absolute ethanol, and deionized water for 15 minutes, and then dry them naturally at room temperature for later use;
(2)同实施例1中的溶胶-凝胶的具体方法一致;(2) Consistent with the specific method of the sol-gel in embodiment 1;
(3)同实施例1。(3) with embodiment 1.
实施例8:Embodiment 8:
(1)同实施例1;(1) with embodiment 1;
(2)同实施例1(2)中的溶胶-凝胶的具体方法,只将旋涂过程重复次数改为三次;(2) With the specific method of the sol-gel in embodiment 1 (2), only the number of repetitions of the spin coating process is changed to three times;
(3)同实施例1。(3) with embodiment 1.
对实施例1-3进行相应的检测结果分析:三种方法制备的ZnO种子层都均匀分布在钛基底表面,另外,相比较溶胶凝胶法,通过原子层沉积法、高真空磁控溅射后水热生长的ZnO纳米棒阵列几乎与基底垂直,分布更加均匀,ZnO纳米棒的直径约100nm,长度约2μm,与ZnO种子层比较,制备的ZnO纳米棒阵列具有更优良的抗菌效果,如图1所示的ZnO种子层和纳米棒对金黄色葡萄球菌的抗菌OD柱状对比图,对图中分析,纯Ti几乎没有抗菌性,ALD-ZnOs的抗菌性为45.5%,ALD-ZnO的抗菌性为97.0%,Sol-ZnOs的抗菌性为90.2%,Sol-ZnO的抗菌性为96.4%,Spu-ZnOs的抗菌性为45.0%,Spu-ZnO的抗菌性为98.2%。Carry out corresponding detection result analysis to embodiment 1-3: the ZnO seed layer that three kinds of methods prepare are all evenly distributed on the surface of titanium substrate, in addition, compare sol-gel method, through atomic layer deposition method, high vacuum magnetron sputtering The ZnO nanorod array after hydrothermal growth is almost perpendicular to the substrate, and the distribution is more uniform. The diameter of the ZnO nanorod is about 100nm and the length is about 2μm. Compared with the ZnO seed layer, the prepared ZnO nanorod array has a better antibacterial effect, such as The antibacterial OD bar chart of the ZnO seed layer and nanorods against Staphylococcus aureus shown in Figure 1 shows that pure Ti has almost no antibacterial activity, the antibacterial activity of ALD-ZnOs is 45.5%, and the antibacterial activity of ALD-ZnO The antibacterial activity of Sol-ZnOs is 97.0%, the antibacterial activity of Sol-ZnOs is 90.2%, the antibacterial activity of Sol-ZnO is 96.4%, the antibacterial activity of Spu-ZnOs is 45.0%, and the antibacterial activity of Spu-ZnO is 98.2%.
对所制备的ZnO种子层和纳米棒进行表面形貌分析,如图2-8所示,经SEM分析可知,三种方法制备的ZnO种子层都均匀分布在钛基底表面,另外,相比较溶胶凝胶法,通过原子层沉积法、高真空磁控溅射后水热生长的ZnO纳米棒阵列几乎与基底垂直,分布更加均匀,ZnO纳米棒的直径约100nm,长度约2.5μm;对实施例7、8进行以玻璃为基底的SEM测试并进行检测结果的分析,如图16、17所示,对比钛基底,在玻璃基底上通过溶胶-凝胶法后水热生长的ZnO纳米棒更垂直,更密集;对实施例8进行检测结果的分析:对比旋涂过程重复2次,重复3次生长的ZnO纳米棒阵列表面变得更加不平整。The surface morphology of the prepared ZnO seed layer and nanorods was analyzed, as shown in Figure 2-8. According to SEM analysis, the ZnO seed layers prepared by the three methods were evenly distributed on the surface of the titanium substrate. In addition, compared with the sol Gel method, the ZnO nanorod array grown by atomic layer deposition and high vacuum magnetron sputtering is almost perpendicular to the substrate, and the distribution is more uniform. The diameter of the ZnO nanorod is about 100nm and the length is about 2.5μm; 7 and 8 conducted SEM tests with glass substrates and analyzed the test results. As shown in Figures 16 and 17, compared with titanium substrates, the ZnO nanorods grown by hydrothermal method on glass substrates after sol-gel method are more vertical , denser; the analysis of the detection results of Example 8: compared with the spin-coating process repeated twice, the surface of the ZnO nanorod array grown three times became more uneven.
对ZnO纳米棒进行疏水型测试,液体在固体材料表面上的接触角,是衡量该液体对材料表面润湿性能的重要参数,并进而获得材料表面固-液、固-气界面相互作用的许多信息,如图9-15所示,经接触角图的分析测试,抛光钛片的接触角图为78.3±1.1°(如图9所示),溶胶-凝胶法得到的ZnO种子层的接触角图为43.3±4.8°(如图10所示),原子层沉积法得到的ZnO种子层的接触角图为80.7±1.5°(如图11所示),高真空磁控溅射得到的ZnO种子层的接触角图为93.8±1.4°(如图12所示),溶胶-凝胶法后水热的接触角图为95.0±1.7°(如图13所示),原子层沉积法后水热的接触角图为140.2±1.2°(如图14所示),高真空磁控溅射后水热的接触角图为141.2±3.7°(如图15所示)。从接触角图分析可以看出,所制备的ZnO纳米棒具有良好的疏水性能,而且经过溶胶-凝胶法水热处理、原子层沉积法、高真空磁控溅射法处理后的ZnO纳米棒的疏水效果最好。The hydrophobicity test of ZnO nanorods, the contact angle of the liquid on the surface of the solid material is an important parameter to measure the wettability of the liquid on the surface of the material, and then obtain many of the solid-liquid and solid-gas interface interactions on the surface of the material. Information, as shown in Figure 9-15, through the analysis and test of the contact angle diagram, the contact angle diagram of the polished titanium sheet is 78.3±1.1° (as shown in Figure 9), and the contact angle of the ZnO seed layer obtained by the sol-gel method The angle figure is 43.3 ± 4.8 ° (as shown in Figure 10), the contact angle figure of the ZnO seed layer obtained by atomic layer deposition is 80.7 ± 1.5 ° (as shown in Figure 11), the ZnO obtained by high vacuum magnetron sputtering The contact angle diagram of the seed layer is 93.8±1.4° (as shown in Figure 12), the contact angle diagram of hydrothermal after the sol-gel method is 95.0±1.7° (as shown in Figure 13), and the hydrothermal contact angle diagram after the atomic layer deposition method The thermal contact angle diagram is 140.2±1.2° (as shown in FIG. 14 ), and the hydrothermal contact angle diagram after high vacuum magnetron sputtering is 141.2±3.7° (as shown in FIG. 15 ). It can be seen from the contact angle diagram analysis that the prepared ZnO nanorods have good hydrophobic properties, and the ZnO nanorods treated by sol-gel method hydrothermal treatment, atomic layer deposition method and high vacuum magnetron sputtering method have good hydrophobic properties. Hydrophobic works best.
上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.
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