BibTeX record conf/dac/ZhangZCZX024

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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@inproceedings{DBLP:conf/dac/ZhangZCZX024,
  author       = {Xinyun Zhang and
                  Su Zheng and
                  Guojin Chen and
                  Binwu Zhu and
                  Hong Xu and
                  Bei Yu},
  title        = {Fracturing-aware Curvilinear {ILT} via Circular E-beam Mask Writer},
  booktitle    = {{DAC}},
  pages        = {134:1--134:6},
  publisher    = {{ACM}},
  year         = {2024}
}

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